規格/型號 |
L2500(L2500-UV)/L1289 (L1289-UV) |
|
| Laser |
Beam
Positioner |
Measurement
system |
| Viewing |
Computer
Controller |
| Handler |
| Autoloader |
|
| Fiber laser |
UV laser |
| Wavelength：1064 ± 5 nm |
Wavelength：354.7 nm |
| Cooling Method：Air Cooling. |
Cooling Method：water Cooling. |
|
| Field size：80×80 mm |
Field size：80×80 mm |
| Resolution：2.4μm |
Resolution：2.4μm |
| Spot size：＜50μm |
Spot size：≦15μm |
|
| Type：Reed relay |
| Channel：128/single,32/4wires |
| Range：＜0.001 ohm to＞10 ohm |
|
| Trim area：CCD camera with lens viewing |
| Substrate Alignment：CCD with pattern recognition. |
|
| Type：Standard Industry Computer |
| CPU Type：Pentium Base |
|
| X/Y/Z stage：250×250×15mm |
| XYZ Resolution：＜5μm |
| R stage：>±5° |
Dimensions：
W880×D1040×H1450mm |
Dimensions：W1040×D1302×H1880mm
|
| Weight：700 kg |
Weight：770 kg |
| Power：AC 220V single phase |
| Air Supply：85~115 psi |
|
| * |
Parts Load/unload：
Elevators load/unload form
2 magazine carousel. |
| * |
Cartridge Capacity：
300 mm |
| * |
Transfer Cycle Time：0.8s |
| * |
Substrate Size：adjustable
70 to 150 mm |
| * |
Elevator Driver：
Micro-stepping motor |
| * |
Pickup Type：Vacuum Cup |
|
