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Specifications

 

Spec./Models

L2500(L2500-UV)/L1289 (L1289-UV)

Laser
Beam
Positioner
Measurement
system
Viewing
Computer
Controller
Handler
Autoloader
Fiber laser UV laser
Wavelength:1064 ± 5 nm Wavelength:354.7 nm
Cooling Method:Air Cooling. Cooling Method:water Cooling.
Field size:80×80 mm Field size:80×80 mm
Resolution:2.4μm Resolution:2.4μm
Spot size:<50μm Spot size:≦15μm
Type:Reed relay
Channel:128/single,32/4wires
Range:<0.001 ohm to>10 ohm
Trim area:CCD camera with lens viewing
Substrate Alignment:CCD with pattern recognition.
Type:Standard Industry Computer
CPU Type:Pentium Base
X/Y/Z stage:250×250×15mm
XYZ Resolution:<5μm
R stage:>±5°
Dimensions:
W880×D1040×H1450mm
Dimensions:W1040×D1302×H1880mm
Weight:700 kg Weight:770 kg
Power:AC 220V single phase
Air Supply:85~115 psi
* Parts Load/unload:
Elevators load/unload form
2 magazine carousel.
* Cartridge Capacity:
300 mm
* Transfer Cycle Time:0.8s
* Substrate Size:adjustable
70 to 150 mm
* Elevator Driver:
Micro-stepping motor
* Pickup Type:Vacuum Cup

 

 

 

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