桌上型雷射修阻机

具备完整光学辨识、精密量测及移动控制能力

  • 有高速修整、调阻能力
  • 本机台可搭配客户指定量测系统
  • 支持多种视觉对位模式,对位图形可由用户自行定义
  • 可搭配高效能光纤雷射系统(1064nm) 、 UV雷射系统(354.7nm)或指定雷射源
  • 可针对各式厚/薄混合集成电路及芯片电阻进行高阻、 低阻及其他动态修整
欲观看更多实例,请点此处 实际应用范例

软件说明

全中文接口软件操作画面,支持多种影像对位模式,微调修改丶掌握度高。

各式雷射修整刀法

P-cut

double-P-cut

scan-cut

L-cut with shadow

serpentine-cut

Laser system
Wavelength 1064 ± 5 nm
Spot size <50μm
Working field size 80 × 80 mm
Working distance 160 mm
Repeatability 10 μm
Focus adjustment range 50 mm
Velocity control Positioner for each axis moves independently
Measurement system
Channel 128/single,32/4wires
Step-and-Repeat Parts Handler
Resolution 5 μm
Theta travel ± 5°
Translation time 500 ms
Dimensions W600×D672×H1039mm
Air Supply 85~115 psi
Type Fiber laser
Cooling Method Built-in fans
Trimming speed 0.1 to 1200 mm/sec
Beam Positioning
Resolution 2.4 μm
Depth of focus ± 0.6 mm
Focused beam diameter 55 μm ± 10%
Velocity range 0.01 to 320 mm/s
Type Reed relay
Range 0.001 ohm to 10 M ohm
Travel 250 × 250 mm
Accuracy ± 10 μm
Theta resolution Approx. 5 μ radian
Probe cards Industry standard 4.5. 6. and 6.5 in rectangular
Power AC 110V / 220V