L1289 雷射修阻机

具备完整光学辨识、精密量测及移动控制能力

  • 修阻机具有高速修整、调阻能力,可针对各式厚/薄混合集成电路及芯片、片式电阻进行静态修整、调阻及其他动态修整;L1289低阻雷射修阻机使用高效能光纤雷射系统(1064nm),搭配NI-DMM量测系统(可选购其他功能,如电流、电压、频率、周期、电容值),并结合一组自动供料/下料系统,完全展现出高效能、低维护成本之特性,为雷射修整、调阻制程中不可或缺之生产利器。
欲观看更多实例,请点此处 实际应用范例

软件说明

全中文接口软件操作画面,支持多种影像对位模式,微调修改丶掌握度高。

各式雷射修整刀法

P-cut

double-P-cut

scan-cut

L-cut with shadow

serpentine-cut

Laser system
Wavelength 354.7 nm
Beam Positioning
Resolution 2.4μm
Measurement system
Channel 128/single,32/4wires
Viewing
Substrate Alignment CCD with pattern recognition.
Type Standard Industry Computer
Handler
XYZ Resolution <5μm
Dimensions W1180×D1440×H1880mm
Power AC 220V single phase
Autoloader
Cartridge Capacity 300 mm
Substrate Size adjustable 70 to 150 mm
Pickup Type Vacuum Cup
Type UV laser
Cooling Method Water cooling
Field size 80×80 mm
Spot size ≦15μm
Type Reed relay
Range <0.001Ω to>10Ω
Trim area CCD camera with lens viewing
Computer Controller
CPU Type Pentium Base
X/Y/Z stage 250×250×15mm
R stage ±5°
Weight 770 kg
Air Supply 85~115 psi
Parts Load/unload Elevators load/unload form 2 magazine carousel.
Transfer Cycle Time 0.8s
Elevator Driver Micro-stepping motor