L1289 雷射修阻機

具備完整光學辨識、精密量測及移動控制能力

  • L1289低阻雷射阻機具有高速修整、調阻能力,可針對各式厚/薄混合積體電路及晶片、片式電阻進行靜態修整、調阻及其他動態修整;L1289低阻雷射修阻機使用高效能光纖雷射系統(1064nm),搭配NI-DMM量測系統(可選購其他功能,如電流、電壓、頻率、週期、電容值),並結合一組自動供料/下料系統,完全展現出高效能、低維護成本之特性,為雷射修整、調阻製程中不可或缺之生產利器。
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軟體說明

全中文介面軟體操作畫面,支援多種影像對位模式,微調修改丶掌握度高。

各式雷射修整刀法

P-cut

double-P-cut

scan-cut

L-cut with shadow

serpentine-cut

Laser system
Wavelength 354.7 nm
Beam Positioning
Resolution 2.4μm
Measurement system
Channel 128/single,32/4wires
Viewing
Substrate Alignment CCD with pattern recognition.
Type Standard Industry Computer
Handler
XYZ Resolution <5μm
Dimensions W1180×D1440×H1880mm
Power AC 220V single phase
Autoloader
Cartridge Capacity 300 mm
Substrate Size adjustable 70 to 150 mm
Pickup Type Vacuum Cup
Type UV laser
Cooling Method Water cooling
Field size 80×80 mm
Spot size ≦15μm
Type Reed relay
Range <0.001Ω to>10Ω
Trim area CCD camera with lens viewing
Computer Controller
CPU Type Pentium Base
X/Y/Z stage 250×250×15mm
R stage ±5°
Weight 770 kg
Air Supply 85~115 psi
Parts Load/unload Elevators load/unload form 2 magazine carousel.
Transfer Cycle Time 0.8s
Elevator Driver Micro-stepping motor