桌上型雷射修阻機

具備完整光學辨識、精密量測及移動控制能力

  • 有高速修整、調阻能力
  • 本機台可搭配客戶指定量測系統
  • 支援多種視覺對位模式,對位圖形可由使用者自行定義
  • 可搭配高效能光纖雷射系統(1064nm) 、 UV雷射系統(354.7nm)或指定雷射源
  • 可針對各式厚/薄混合積體電路及晶片電阻進行高阻、 低阻及其他動態修整
欲觀看更多實例,請點此處 實際應用範例

軟體說明

全中文介面軟體操作畫面,支援多種影像對位模式,微調修改丶掌握度高。

各式雷射修整刀法

P-cut

double-P-cut

scan-cut

L-cut with shadow

serpentine-cut

Laser system
Wavelength 1064 ± 5 nm
Spot size <50μm
Working field size 80 × 80 mm
Working distance 160 mm
Repeatability 10 μm
Focus adjustment range 50 mm
Velocity control Positioner for each axis moves independently
Measurement system
Channel 128/single,32/4wires
Step-and-Repeat Parts Handler
Resolution 5 μm
Theta travel ± 5°
Translation time 500 ms
Dimensions W600×D672×H1039mm
Air Supply 85~115 psi
Type Fiber laser
Cooling Method Built-in fans
Trimming speed 0.1 to 1200 mm/sec
Beam Positioning
Resolution 2.4 μm
Depth of focus ± 0.6 mm
Focused beam diameter 55 μm ± 10%
Velocity range 0.01 to 320 mm/s
Type Reed relay
Range 0.001 ohm to 10 M ohm
Travel 250 × 250 mm
Accuracy ± 10 μm
Theta resolution Approx. 5 μ radian
Probe cards Industry standard 4.5. 6. and 6.5 in rectangular
Power AC 110V / 220V