L2500 雷射修阻機

具備完整光學辨識、精密量測及移動控制能力

  • L2500 雷射調阻機適用於厚/薄膜電阻修整、調阻,加工範圍達80×80 mm,使用Fiber Laser為主要雷射光源,並搭配KEITHLEY電流電表,NI DMM 電表,修阻誤差精度小於1%。
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軟體說明

全中文介面軟體操作畫面,支援多種影像對位模式,微調修改丶掌握度高。

各式雷射修整刀法

P-cut

double-P-cut

scan-cut

L-cut with shadow

serpentine-cut

Laser system
Wavelength 1064 ± 5nm
Beam Positioning
Resolution 2.4μm
Measurement system
Channel 128/single,32/4wires
Viewing
Substrate Alignment CCD with pattern recognition.
Type Standard Industry Computer
Handler
XYZ Resolution <5μm
Dimensions W880×D1040×H1450mm
Power AC 220V single phase
Type Fiber laser
Cooling Method Air cooling
Field size 80×80 mm
Spot size <50μm
Type Reed relay
Range <0.001Ω to>10Ω
Trim area CCD camera with lens viewing
Computer Controller
CPU Type Pentium Base
X/Y/Z stage 250×250×15mm
R stage ±5°
Weight 700 kg
Air Supply 85~115 psi